Size-Controlled Spalling of LaAlO₃/SrTiO₃ Micromembranes

The ability to form freestanding oxide membranes of nanoscale thickness is great interest for enabling material functionality and integrating oxides in flexible electronic photonic technologies. Recently, a route has been demonstrated forming conducting heterostructure LaAlO3 SrTiO3, the canonical system electronics. In this route, epitaxial growth on SrTiO3 resulted strained state that relaxed by producing with random sizes locations. Here, we extend method enable self-formed LaAlO3/SrTiO3 micromembranes control over membrane position, their lateral from 2 20 μm, controlled transfer other substrates choice. This opens up possibility study use two-dimensional electron gas advanced device concepts.